Performance evaluation of an automated material handling system for a wafer fab

Discrete-event simulation model was developed to evaluate the performance of an automated material handling system (AMHS) for a wafer fab with a zone control scheme avoiding all vehicle collision. The layout of this AMHS is a custom configuration. The track option contains turntables, turnouts and high-speed express lanes. The behavior of the interarrival for all stockers from the real data set was analyzed to verify the assumption of the simulation model. The results show that the underlying distributions of most stockers for interarrival times belong to the exponential or Weibull distribution. The simulation results show that the number of vehicles significantly affects the average delivery time and the average throughput. A simple one-factor response surface model is used to determine the appropriate vehicle numbers. This study was also investigated to determine the vehicle numbers in an automated guided vehicle-based intrabay material handling system. r 2003 Elsevier Ltd. All rights reserved.